Quantum Chip Fabrication Space, QC-Fab
Introduction
Quantum chip fabrication technology stands at the very heart of building the hardware infrastructure for quantum computers, enabling the creation of processors with exceptional coherence, scalability, and process reproducibility. The Quantum Chip Fabrication Space (QC-Fab) is dedicated to advancing innovation in superconducting quantum device manufacturing, establishing local capabilities for both R&D and small-scale pilot production, and serving as a pivotal hub for interdisciplinary collaboration in quantum science and technology.
QC-Fab’s mission is to elevate superconducting quantum device manufacturing to a world-leading standard. To achieve this, the platform has strategically acquired fully automated 8-inch wafer fabrication systems with state-of-the-art process capabilities, creating a high-specification manufacturing environment seamlessly aligned with semiconductor industry practices. Key facilities include optical and e-beam lithography systems, superconducting metal and oxide thin-film sputtering systems, dry and wet etching equipment, optical and electron microscopes, and automated electrical probe stations—supporting a fully integrated workflow from material deposition and patterning to measurement.
Operating with standardized, fully automated 8-inch wafer processes, QC-Fab ensures outstanding process stability and reproducibility, allowing for the fabrication, testing, and verification of large-area wafers. Its technical services are carried out by a dedicated team of professional engineers and offered in a spirit of openness and collaboration to academic and industrial partners, both domestically and internationally.
The platform’s service portfolio covers superconducting metal and dielectric thin-film deposition, circuit patterning and etching, Josephson junction fabrication, and complete quantum qubit chip manufacturing. In addition, QC-Fab can be paired with the Quantum Computing Test Platform for vertically integrated design–fabrication–test workflows, enabling seamless end-to-end development.
By combining equipment, advanced process technologies, and collaborative networks, QC-Fab strives to build an internationally competitive ecosystem for quantum hardware R&D, laying a solid foundation for future world-class research in superconducting quantum computing.
Available Services (progressively rolled out):
1. Growth of superconducting metal and dielectric thin films
2. Thin-film patterning, device, and circuit lithography and etching
3. Fabrication of superconducting Josephson junctions (including oxide formation and junction definition processes)
4. Complete quantum qubit chip manufacturing (including integrated fabrication and pre-packaging processes)
QC-Fab’s mission is to elevate superconducting quantum device manufacturing to a world-leading standard. To achieve this, the platform has strategically acquired fully automated 8-inch wafer fabrication systems with state-of-the-art process capabilities, creating a high-specification manufacturing environment seamlessly aligned with semiconductor industry practices. Key facilities include optical and e-beam lithography systems, superconducting metal and oxide thin-film sputtering systems, dry and wet etching equipment, optical and electron microscopes, and automated electrical probe stations—supporting a fully integrated workflow from material deposition and patterning to measurement.
Operating with standardized, fully automated 8-inch wafer processes, QC-Fab ensures outstanding process stability and reproducibility, allowing for the fabrication, testing, and verification of large-area wafers. Its technical services are carried out by a dedicated team of professional engineers and offered in a spirit of openness and collaboration to academic and industrial partners, both domestically and internationally.
The platform’s service portfolio covers superconducting metal and dielectric thin-film deposition, circuit patterning and etching, Josephson junction fabrication, and complete quantum qubit chip manufacturing. In addition, QC-Fab can be paired with the Quantum Computing Test Platform for vertically integrated design–fabrication–test workflows, enabling seamless end-to-end development.
By combining equipment, advanced process technologies, and collaborative networks, QC-Fab strives to build an internationally competitive ecosystem for quantum hardware R&D, laying a solid foundation for future world-class research in superconducting quantum computing.
Available Services (progressively rolled out):
1. Growth of superconducting metal and dielectric thin films
2. Thin-film patterning, device, and circuit lithography and etching
3. Fabrication of superconducting Josephson junctions (including oxide formation and junction definition processes)
4. Complete quantum qubit chip manufacturing (including integrated fabrication and pre-packaging processes)
Regulations
Reservation: